The dependence of the ratio of hydrogen to argon (NH656/NAr811) on the discharge current (Id), crucible current (Icr), oxygen flux (QO2) and tetraethoxysilane flux (QTEOS) in a mixture of Ar+O2+Al+TEOC | Международный научно-исследовательский журнал

Исследование состава плазмы дугового разряда с полым катодом и активным Al анодом в парах гексаметилдисилазана/тетраэтоксисилана

Figure 5 - The dependence of the ratio of hydrogen to argon (NH656/NAr811) on the discharge current (Id), crucible current (Icr), oxygen flux (QO2) and tetraethoxysilane flux (QTEOS) in a mixture of Ar+O2+Al+TEOC

The dependence of the ratio of hydrogen to argon (NH656/NAr811) on the discharge current (Id), crucible current (Icr), oxygen flux (QO2) and tetraethoxysilane flux (QTEOS) in a mixture of Ar+O2+Al+TEOC

DOI: 10.60797/IRJ.2025.155.33.6